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Anti-Corrosion Spin Coater (6K RPM & 6" Wafer Max.) -
VTC-200P Vacuum Spin Coater is suitable for semiconductor process, crystal, optical disc, plate making and surface coating, etc. The equipment can store 12 sets of programs, and each set contains 6 running stages. The upper cover of the chamber can heat the sample (optional function), which is beneficial to the coating process of thin film materials with high viscosity.
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