Spin-Spray Coater (2000 rpm And 6" Max) With Heating Cover

Brand Shenyang Kejing

Product origin Shenyang, China

Delivery time 22 working days

Supply capacity 50 sets

VTC-200-4P Infrared Heating Spray Spin Coater (Glue Leveler, Developer, Glue Spinner, Spin Coater) with heating function of upper cover, is mainly used for the development of graphics and surface coating in semiconductor and plate making technology. After the glue leveling or development process, the solvent in the colloidal film evaporates to the lowest content. During the working process, the developing liquid or colloid is sprayed onto the sample in the form of mist, so that the solution is evenly distributed on sample surface, which is conducive to the smooth performance of the film and the development process.

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Spin-Spray Coater (2000 rpm And 6" Max) With Heating Cover

Main Features

1. The samples are fixed with rubber chucks and magnetic steel sheet templates, which are not only easy to take and place, but also easy to operate, and the sizes of rubber chucks and magnetic steel sheet templates can be customized according to needs.

2. The upper cover of the machine is designed with infrared heating function to keep the temperature at a stable value.

3. There are 4 groups of nozzles in the upper cover of the machine, and the colloid is sprayed on the sample surface in mist form to make the film more uniform.

4. The motor part, temperature control part and liquid injection part of the machine are controlled by independent power supply respectively. The motor speed regulation system is controlled by PLC with high anti-interference, and the rotation speed can be adjusted within the range of 100 to 2000RPM.

5. The film coater has two stages during operation. Before starting, time 1, speed 1, time 2, and speed 2 can be set respectively according to actual needs. After the setting is completed, the machine can be started. It first runs at speed 1 for a period of time 1, so that the coating material is gradually dispersed. When time 1 is over, it automatically enters time 2 stage operation, so that the coating material is more uniform.

6. The spray spin coater starts quickly and has a stable rotation speed to ensure the uniformity and consistency of the film thickness.

7. In the installation structure, shock absorption measures are taken to reduce noise during operation.

8. The chamber is made of PP material with longer service life to improve the resistance abilities of chemical corrosion and excellent stress crack, and the machine body adopts cast aluminum structure, which is durable and light in weight.

Technical Parameters

Product Name	VTC-200-4P Infrared Heating Spray Spin Coater
Product Model	VTC-200-4P
Installation Conditions	This equipment is required to be used at an altitude of 1000m or less, a temperature of 25℃±15℃, and a humidity of 55%Rh±10%Rh. 1. Water: equipped with water inlet and outlet 2. Electricity: AC220V 50Hz, must have good grounding 3. gas: N/A 4. Workbench: size 600mm×600mm×700mm, bearing more than 50kg 5. Ventilation device: needed
Main Parameters (Specification)	1. Power supply: AC220/110V 50/60Hz 2. Motor power: 210W 3. Dual speed coating function: The dual speed and coating time are set separately. After starting, it runs at low speed (glue dipping), and then automatically switches to high-speed operation (glue leveling). The speed stability is ±1%, making the coating more uniform. Speed 1: valid within 100 to 2000RPM T1 time: valid within 1 to 200s Speed 2: valid within 100 to 2000RPM T2 time: valid within 1 to 200s 4. Suitable for coating samples of Φ153mm 5. Heating temperature range of the upper cover: 0-100℃ 6. The ambient temperature is 5-40℃, the relative humidity is not more than 85%RH, and there is no strong vibration source nor corrosive gas around the equipment.
Product Dimension and Weight	Dimension of the host equipment: 500mm (length) × 410mm (width) × 330mm (height) Weight: 24kg