Anti-Corrosion Spin Coater (6K RPM & 6" Wafer Max.)

Brand Shenyang Kejing

Product origin Shenyang, China

Delivery time 10 working days

Supply capacity 50 sets

VTC-200P Vacuum Spin Coater is suitable for semiconductor process, crystal, optical disc, plate making and surface coating, etc. The equipment can store 12 sets of programs, and each set contains 6 running stages. The upper cover of the chamber can heat the sample (optional function), which is beneficial to the coating process of thin film materials with high viscosity.

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Anti-Corrosion Spin Coater (6K RPM & 6" Wafer Max.)

Main Features

1. The equipment can store 12 sets of programs, and each set contains 6 running stages. The setting range of the acceleration and deceleration rate for each stage: 100rpm/s-2000rpm/s, time range for each stage: 0-60s

2. The sample is fixed by means of vacuum adsorption, which is easy to operate.

3. The degree of vacuum can reach -0.08MPa.

4. Samples can be easily centered using the positioning tool to reduce vibration or fly-outs caused by misalignment.

5. Different chucks can be used according to sample specifications, and the replacement is convenient and simple.

6. A 24V brushless DC motor is adopted and it has the advantages of high reliability, strong adaptability, simple repair and maintenance, low noise, small vibration, stable operation, fast and stable startup, stable operation after acceleration, to ensure the consistency and uniformity of coating thickness.

7. This machine can be used in a glove box, but the control part and vacuum pump should be placed outside the box.

8. Coating can be carried out in an inert gas atmosphere (such as Ar, N2).

9. The oilless parallel-bar vacuum pump has the advantages of small size, simple structure, easy operation, convenient maintenance, and no environmental pollution.

10. The chamber is made of PP material with longer service life to improve the resistance abilities of chemical corrosion and excellent stress crack, and the machine body adopts cast aluminum structure, which is durable and light in weight.

11. English operating system

12. It has the function of open-cover protection. When the top cover is opened during the coating process or at the end of the coating, the machine immediately decelerates rapidly until it stops.

13. The controller adopts a single control box with LCD numerical display, which is more intuitive and reliable.

Technical Parameters

Product Name	VTC-200P Vacuum Spin Coater
Product Model	VTC-200P
Installation Conditions	This equipment is required to be used at an altitude of 1000m or less, a temperature of 25℃±15℃, and a humidity of 55%Rh±10%Rh. 1. Water: equipped with water inlet and outlet 2. Electricity: AC220V 50Hz, must have good grounding 3. gas: N/A 4. Workbench: size 600mm×600mm×700mm, bearing more than 50kg 5. Ventilation device: needed
Main Parameters (Specification)	1. Power supply: 220V 50HZ 2. Motor power: 360W/24V 3. Speed range: 500rpm-6000rpm adjustable 4. Program operation: 12 groups of programs can be stored, each group includes 6 running stages. 5. The setting range of the acceleration and deceleration rate of each stage: 100rpm/s-2000rpm/s, time range of each stage: 0-60s. 6. Size of chuck: φ100mm 7. The machine can be equipped with heating function: * heating range: RT-100℃ * the upper cover and sink/water tank are made of PP. * The temperature uses an independent controller, not related to the host program control
Product Dimension and Weight	Dimension: φ250mm×360mm Weight: 20kg

Standard Accessories

No.	name	qty	picture
1	Vacuum Chuck (φ100mm)	1 pcs
2	O-Ring	1 pcs	-
3	Central Positioner/Locator (including 4 positioning studs)	1 pcs
4	Epoxy Injector/Syringe (20ml)	1 pcs
5	Injector/Syringe Bracket	1 pcs	-
6	Oilless Vacuum Pump	1 pcs