Plasma Three-Target Sputtering Instrument
Brand Shenyang Kejing
Product origin Shenyang, Liaoning
Delivery time 10 working days
Supply capacity 50 sets
1. The Three Target Plasma Sputtering Coater is equipped with a vacuum meter and a sputtering current meter, which can monitor the operation of the equipment at any time to achieve a stable and reliable coating effect.
2. The Three Target Plasma Sputtering Coater can adjust the vacuum chamber pressure, ionization current, and select the appropriate ionization gas through the sputtering current controller and the micro vacuum air valve to optimize the coating effect.
3. The specially designed bell jar edge rubber seal will not cause the glass bell jar to crack after long-term use, thereby improving the durability of the Three Target Plasma Sputtering Coater.
Introduction of three targets sputtering coater:
GSL-1100X-SPC-16-3 three targets sputtering coater is a simple, reliable and economical coating equipment designed based on the principle of diode (DC) direct current sputtering (DC diode sputtering coating refers to the process of using the sputtering effect produced by particle bombardment of the target material in a vacuum environment to make the target material atoms or molecules ejected from the solid surface and deposited on the substrate to form a thin film. It is a kind of physical vapor deposition (PVD) thin film preparation technology.). The special feature of three targets sputtering coater is that three targets are installed in a vacuum chamber, and the rotating sample stage can coat three materials on the same sample in turn. Therefore, it is suitable for the preparation of various composite film samples in the laboratory and the production of experimental electrodes for non-conductor materials. Three targets sputtering coater is small in size, saves laboratory space, is easy to operate, and is especially suitable for laboratory use.
Advantages of three target heads plasma sputtering coater:
1.Three target heads plasma sputtering coater uses ceramic sealed high-voltage electrode joints, which are more durable and reduce maintenance costs compared to traditional rubber seals.
2.Three target heads plasma sputtering coater uses a large-capacity sputtering vacuum chamber and a sputtering target of corresponding area, which can improve the uniformity and purity of the coating.
3.Three target heads plasma sputtering coater has passed ce certification and meets safety standards.
Technical parameters of three target plasma sputtering coater：
| Product name | GSL-1100X-SPC-16-3 Three Target Heads Plasma Sputtering Coater |
| Product model | GSL-1100X-SPC-16-3 |
| Installation conditions | This equipment is required to be used at an altitude of less than 1000m, a temperature of 25℃±15℃, and a humidity of 55%Rh±10%Rh. 1. Water: Not required. 2. Electricity: AC220V 50Hz, must be well grounded. 3. Gas: The equipment chamber needs to be filled with argon (purity above 99.99%), and you need to prepare your own argon gas cylinder (with a pressure reducing valve). 4. Workbench: size 600mm×600mm×700mm, load-bearing capacity above 50kg. 5. Ventilation device: Not required. |
| Main parameters | 1. Target diameter: Ø45mm. 2. Vacuum chamber: Ø160mm×120mm. 3. Vacuum degree: ≤4×10-2mbar. 4. Target position: 3. 5. Max current: 50mA. 6. Settable limit time: 900s. 7. Micro vacuum air valve: connected to Ø3mm hose. 8. Limit voltage: 1600V DC. 9. Mechanical pump: 2L/s. |
Standard accessories of three target plasma sputtering coater:
| NO. | Name | Qty | Picture |
| 1 | Gold Sputtering Target | 1 piece | -- |
| 2 | Copper sputtering target | 1 piece | -- |
| 3 | Aluminum sputtering target | 1 piece | -- |
| 4 | Thermal evaporation accessories | 1 piece | -- |
| 5 | Fuse | 2 piece | -- |
Optional accessories of three targets sputtering coater:
| NO. | Name | Function | Picture |
| 1 | Various sputtering targets such as gold, indium, silver, platinum, etc. | (Optional) | -- |
About us:
Customer satisfaction is our unremitting goal. We always adhere to the customer-centric service concept and provide comprehensive technical support and after-sales service. Whether it is product selection suggestions, operation training, fault diagnosis and maintenance services, our service team can respond to customer needs in the first time.
