Plasma Cleaner With High RF Power Supply
Brand Shenyang Kejing
Product origin Shenyang, China
Delivery time 10 working days
Supply capacity 50 sets
PCE-6V Small Plasma Cleaner integrates RF plasma generation technology, computer control technology and software programming technology, and uses gas as cleaning medium, which effectively avoids secondary contamination caused by liquid cleaning medium. The sample stage of PCE-6V small plasma cleaner can be equipped with a heating function, and a negative bias voltage can be applied for plasma etching of the sample. In addition, it can change the properties of certain material surfaces as needed under specific conditions.
Main Features
1. The use of gas as cleaning medium avoids secondary contamination caused by liquid cleaning medium.
2. The organic pollutants can be thoroughly cleaned in a short time.
3. The cleaning degree can reach molecular level.
4. The properties of some material surfaces can be changed as needed under specific conditions.
5. The glow discharge in the cleaning process can enhance the adhesion, compatibility and wettability of some special-purpose materials, and can disinfect and sterilize.
6. The sample stage can be equipped with heating function, and negative bias can be added for plasma etching.
7. Widely used in optics, photoelectronics/optoelectronics, electronics, material science, life science, polymer science, biomedicine, microfluidics and other fields
Technical Parameters
Product Name | PCE-6V Small Plasma Cleaner |
Product Model | PCE-6V |
Main Parameters (Specification) | 1. Voltage: AC220V 10A 2. Power consumption: <500W (including vacuum pump) 3. RF power supply: output power 100W, output frequency 13.56MHz 4. Chamber: Ø190mm×98mm 5. Quartz tube: Ø180mm×55mm, wall thickness 7mm 6. Inner chamber: Ø165mm×55mm 7. Cleaning electrode: Ø120mm 8. Sample stage: Ø150mm, effective size Ø140mm 9. The distance between sample stage and electrode: 15mm-50mm adjustable 10. Exhaust pipe: Ø12mm 11. Ultimate vacuum degree: 0.1Pa 12. Working vacuum degree: 60Pa-500Pa 13. Number of air channels: 2 (optional) 14. Number of flow controllers: 1, 2 15. Flow indicator: 2 channels 16. Pneumatic interface: Ø6mm 17. Heating sample stage: Ø100mm, heating sample temperature 200℃-500℃ (optional) 18. Cooling water pressure: 0.2kPa-0.4kPa 19. Working environment: temperature 5℃-35℃, humidity <80% (relative humidity) without condensation, altitude 0-2000m |
Product Dimension and Weight | dimension: 245mm×235mm×460mm (excluding vacuum pump) Weight: 20kg (without vacuum pump)
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Optional Accessories | 1. Heating Sample Stage 2. Flow Controller (range 10, 50, 100, the number of channels can be added ≤ 2) |
Warranty
One year limited with lifetime support (not including rusted parts due to inadequate storage conditions)
Logistics
