High Vacuum Thin Film Preparation Equipment
1. Thin film preparation instrument is developed with Shenyang Kejing's technology, which is durable and stable.
2. The company's own factory produces and tests thin film preparation instrument to ensure quality and coating level.
3. We provide full-service, so you can use it with confidence and maximize the role of thin film preparation instrument.
- Shenyang Kejing
- Shenyang, China
- 22 working days
- 50 sets
- Information
Introduction of Vacuum coating instrument for research:
VTC-600GD Magnetron sputtering coating instrument is a newly independently developed coating equipment, which can be used to prepare single-layer or multi-layer ferroelectric thin film, conductive thin film, alloy thin film, semiconductor thin film, ceramic thin film, dielectric thin film, optical thin film, oxide thin film, hard thin film, polytetrafluoroethylene thin film, etc. VTC-600GD Magnetron sputtering coating instrument can be equipped with up to four target guns, with RF power supply for sputtering coating of non-conductive target materials, and DC power supply for sputtering coating of conductive materials. Compared with similar equipment, Magnetron sputtering coating instrument is not only widely used, but also has the advantages of small size and easy operation. It is an ideal equipment for laboratory preparation of material films, especially suitable for laboratory research on solid electrolytes and OLEDs.
Main features of Vacuum coating instrument for research:
1. Up to four target guns can be selected, and the matching RF power supply is used for sputtering coating of non-conductive target materials, and the matching DC power supply is used for sputtering coating of conductive materials (the target guns can be replaced at will according to customer needs).
2. It can prepare a variety of thin films and has a wide range of applications.
3. The Vacuum coating instrument for research is small in size and easy to operate.
4. The thin film preparation instrument has a modular design of the whole machine, and the vacuum chamber, vacuum pump group, and control power supply are split designs, which can be adjusted according to the actual needs of users.
5. The thin film preparation instrument can select the power supply according to the actual needs of users. One power supply can control multiple target guns, or multiple power supplies can control a single target gun.
Technical parameters of Vacuum coating instrument for research:
Product name | VTC-600GD Magnetron sputtering coating instrument |
Product model | VTC-600GD |
Installation conditions | This equipment is required to be used at a temperature of 25℃±15℃ and a humidity of 55%Rh±10%Rh. 1. Water: The Vacuum coating instrument for research is equipped with a self-circulating cooling water machine (filled with pure water or deionized water) 2. Electricity: AC220V 50Hz, must be well grounded 3. Gas: The equipment chamber needs to be filled with argon (purity above 99.99%), and you need to prepare your own argon gas cylinder (with Ø6mm double ferrule connector) and pressure reducing valve 4. Workbench: size 1500mm×600mm×700mm, load-bearing capacity above 200kg 5. Ventilation device: required |
Main parameters | 1. Power supply voltage: 220V 50Hz. |
2. Total power: <3.5KW. | |
3. Inner diameter of chamber: Ø300mm. | |
4. Ultimate vacuum 8.0x10-5Pa. | |
5. Working temperature: RT-500℃, accuracy ±1℃ (temperature can be increased according to actual needs). | |
6. Number of target guns: 4. | |
7. Cooling method of target gun: water cooling. | |
8. Target size: Ø2″, thickness 0.1mm-5mm (thickness varies due to different target materials). | |
9. DC sputtering power: 500W (optional). | |
10. RF sputtering power: 300W. | |
11. Sample stage: Ø140mm. | |
12. Sample stage speed: adjustable within 1rpm-20rpm. | |
13. Protective gas: Ar, N2 and other inert gases. | |
14. Inlet gas path: Mass flow meter controls 2 inlet paths, 1 flow rate is 100 SCCM, 1 flow rate is 200 SCCM. | |
15. Product specifications: · Dimensions: Host size: 800mm×1000mm×1300mm; · Weight: 190kg |
Standard accessories of Magnetron sputtering coating instrument：
| NO. | Name | Qty | Picture |
| 1 | DC power control system | (Optional) Set | - |
| 2 | RF power control system | 1 Set | - |
| 3 | Film thickness monitor system | 1 Set | - |
| 4 | Molecular pump | 1 unit | - |
| 5 | Chiller | 1 unit | - |
| 6 | Polyester PU tube (Ø6mm) | 4m | - |
Optional accessories of Thin film preparation instrument：
| NO. | Name | Function | Picture |
| 1 | Various targets such as gold, indium, silver, platinum, etc. | (optional) | - |
| 2 | Optional strong magnetic targets can be used for sputtering coating of ferromagnetic materials. | (optional) | - |
Warranty：
One year limited with lifetime support (not including rusted parts due to inadequate storage conditions)
Logistics：
About us：
We are a high-tech company focusing on the research and development and production of coating machines, and we are also a leader in the industry. Each of our products has been carefully designed and strictly tested by designers, and has a high level of equipment performance and accuracy. We not only focus on the product itself, but also pay attention to technological innovation and customer relationships, and are committed to providing high-level experimental instruments to global customers.
From consultation to after-sales, we can provide first-class service to every customer. Our professional team can recommend suitable equipment for you, provide technical support during the use of the product, answer your questions, and help you carry out the project more smoothly. We believe that with our many years of experience, we can help more companies achieve their goals.
Shenyang Kejing keeps "practical, dedicated, hard-working, teamwork, credible, innovative, responsible, customer first high-quality products, advanced services" as the motto, delicated to provide brilliant products and services to customers home and abroad.
In order to keep close contact with industry peers and customers, we also actively participate in major industry exhibitions at home and abroad. Every year, we showcase our latest technologies and products at several important industry exhibitions. Through these platforms where we can meet customers face to face, more people can understand us and support us. Over the years, we have also obtained many customers and cooperation orders on these platforms. It is not only a display of our achievements, but also an important way for us to get closer to the industry.
