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Detailed Usage of Three Target Plasma Sputtering Coater
Three Target Plasma Sputtering Coater is a high-tech device widely used in materials science, physics research and other fields. To ensure that users can use this device correctly and effectively, the following is a detailed usage method:
I. Equipment preparation:
1. Before use, make sure that the Three Target Plasma Sputtering Coater has been properly installed and grounded to prevent static interference.
2. Check all connections of the device to ensure that they are firm and not damaged.
3. Turn on the power of the device and preheat it, which usually takes about 10-15 minutes.
II. Operation process:
1. Place the sample: Place the sample to be processed in the designated position of the device to ensure that the sample is fixed firmly.
2. Set parameters: Set appropriate sputtering power, time, gas flow and other parameters according to experimental requirements.
3. Start sputtering: Press the start button and the device will start sputtering. During this process, please pay close attention to the status of the device to ensure that everything is normal.
4. End of sputtering: When the set sputtering time is reached, the device will stop automatically. At this time, the sample can be taken out for subsequent processing.
III. Precautions:
1. During use, please be sure to wear professional protective glasses and gloves to prevent possible sputtering injuries.
2. If an abnormal situation occurs during the sputtering process, such as equipment failure or safety issues, please press the emergency stop button immediately and contact a professional for inspection and repair.
3. Regularly maintain and service the equipment to ensure its long-term stable operation.
By following the above steps and precautions, users can safely and effectively use the Three Target Plasma Sputtering Coater for experiments and research. Mastering the correct use method can not only protect the equipment, but also ensure the accuracy and reliability of the experimental results.