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Vacuumable And Atmospher Controlled Spin Coater
VTC-200PV Vacuum Spin Coater is suitable for semiconductor process, crystal, optical disc, plate making and surface coating, etc. The chamber of VTC-200PV vacuum spin coater can be vacuumized to coat the sample under completely vacuum condition, which is suitable for film materials that are easily oxidized and deteriorated in air. A clamp is used to fix the sample when the chamber is vacuumized. The equipment can store 12 sets of programs, and each set contains 6 running stages.
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