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Plasma Sputtering Coater With 3 Sputtering Sources And Glove Box
VGB-600-3HD Thin-Film Battery Preparation System can perform experimental operations in a glove box, and is used to prepare single-layer or multi-layer ferroelectric film, conductive film, alloy film, semiconductor film, ceramic films, dielectric film, optical film, oxide film, hard film, PTFE film, etc. The system is equipped with three target guns and one RF power supply for sputter coating of various target materials. The RF power supply can be connected to any target head by a transfer switch.
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